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Semitron® XL20

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OVERVIEW of Semitron® XL20

Semitron® XL20 is a modified polyamide-imide. Semitron® XL20 Optimized PAI was developed by Mitsubishi Chemical Advanced Materials's Research & Development Team. It is Charcoal/Black in color and opaque. The Semitron product line was developed to give new tool designers and forward-thinking end users an opportunity to increase the number of devices successfully produced per wafer while decreasing the cost of consumables per device. This is achieved by increasing the service life of the retaining ring.

FEATURES AND BENEFITS of Semitron® XL20

Benefits of Semitron XL-20
  • Lower cost per wafer
  • Outperforms PPS up to 20x in some processes
  • High strength and stiffness promotes fewer edge defects and better uniformity
  • K (wear) Factor: >= 1000 x 10-10 in3-min/ft-lb-hr (per QTM 55010)
  • Limiting Pressure Velocity: 4000 psi-ft/min (4:1 safety factor applied; QTM 55010)
  • Excellent Mechanical Properties
  • Heat Deflection Temperature of 532° F
  • Semitron® Xl20
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